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Filtering by: Creator Ye, Qian Committee Member Chang, Chih-hung Degree Name Master of Science (M.S.)

Effect of cosputtered catalyst on growth and alignment of carbon nanotubes by plasma enhanced chemical vapor deposition

Creator:

Gunderson, Eric P.

Abstract:

The effect of cosputtered catalyst on growth and alignment of carbon nanotubes (CNTs) grown by plasma enhanced chemical vapor deposition (PECVD) was investigated. Aligned CNTs were observed using a cosputtered catalytic metal deposited directly on boro-aluminosilicate glass. Catalytic metal alloys were sputtered directly onto the substrate using magnetron sputtering. Deposition...

Resource Type:

Masters Thesis