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Filtering by: Creator Allman, Derryl Remove constraint Creator: Allman, Derryl Committee Member Cheng, Larry Remove constraint Committee Member: Cheng, Larry

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  • Atomic Layer Deposition of Multi-Insulator Metal-Insulator-Metal Capacitors

    Creator:
    Austin, Dustin Z.
    Abstract:
    Back end of line (BEOL) metal-insulator-metal capacitors (MIMCAPs) have become a core passive component in modern integrated circuits. International Technology Roadmap for Semiconductors (ITRS) projections for scaling of analog/mixed-signal MIMCAP applications require simultaneously increasing capacitance density while maintaining low leakage current density and low voltage nonlinearity (characterized by the quadratic...
    Resource Type:
    Dissertation
    Full Text:
    possible. To Derryl Allman and the group at ON Semiconductor, thank you for the support of this project