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Filtering by: Creator Liu, Shiang-Yao Committee Member Field, Jennifer

Fluidized-bed nitridation of silicon : direct use of very fine powder for [α]-silicon nitride production

Creator:

Liu, Yao-Dian

Abstract:

2 μm average sized silicon powder was nitrided with 90% N₂/10% H₂ in a fluidized-bed reactor, operated at 1200°C, 1250°C and 1300°C. To fluidize silicon powder, alumina particles with an average size of 300 μm were used as an inert fluidizing conditioner. The feasibility and operating conditions of the fluidization...

Resource Type:

Dissertation

Full Text:

powder for [α]-silicon nitride production AN ABSTRACT OF THE THESIS OF Yao-Dian Liu for the degree