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Filtering by: Creator Zheng, X. Committee Member Ostroverkhova, Oksana Subject Amorphous semiconductors

Evaluation of amorphous oxide semiconductors for thin film transistors (TFTs) and resistive random access memory (RRAM) applications

Creator:

Rajachidambaram, Jaana Saranya

Abstract:

Thin-film transistors (TFTs) are primarily used as a switching element in liquid crystal displays. Currently, amorphous silicon is the dominant TFT technology for displays, but higher performance TFTs will become necessary to enable ultra-definition resolution high-frequency large-area displays. Amorphous zinc tin oxide (ZTO) TFTs were fabricated by RF magnetron sputter...

Resource Type:

Masters Thesis

Full Text:

annealing were found to have a significant impact on TFT properties. X-ray diffraction data indicated that