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Filtering by: Committee Member Simoneit, Bernd R. T.

Fabrication of ultrathin SiC film using grafted poly(methylsilane)

Creator:

Lertwiwattrakul, Wimol

Abstract:

β-SiC is a semiconductor for high temperature devices, which exhibits several outstanding properties such as high thermal stability, good chemical stability and wide band gap. There is a possibility of fabricating a crack-free ultrathin SiC film on silicon wafers by pyrolysis of polymethylsilane (PMS) film. This study looks into the...

Resource Type:

Masters Thesis