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Filtering by: Creator Milton, Graeme W. Committee Member Subramanian, Mas Creator Decker, Shawn R.

On the Properties and Characteristics of Solution Processed Hafnium Based Thin-Films from Aqueous Precursors

Creator:

Decker, Shawn R.

Abstract:

Aqueous hydroxo Hf nanoclusters enable studies to identify and codify steps in the deposition of Hf-based oxide thin films from solution precursors. HfOCl2 reacts with combinations of H2O2(aq), acids, and TMAH to produce polymetal species at high pH and low pH. X-ray scattering and spectroscopic methods reveal the nature of...

Resource Type:

Dissertation

Full Text:

University collected XPS in chapters 7 and 8. Milton Jackson collected DLS for chapter 8. Rose Ruther