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Filtering by: Creator Cheng, Li-Jing Remove constraint Creator: Cheng, Li-Jing Contributor Fast, Dylan B. Remove constraint Contributor: Fast, Dylan B. Degree Field Electrical and Computer Engineering Remove constraint Degree Field: Electrical and Computer Engineering

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  • Nucleation Inhibiting Mechanisms in Atomic Layer Deposition of Nanolaminates

    Creator:
    Witsell, Shane Mike’ele Williama
    Abstract:
    Nucleation in atomic layer deposition (ALD) determines how many cycles are required to initiate growth and to form a continuous film. Nucleation has been exploited for the formation of nanoparticles, catalysts, and for area-selective ALD. Although sometimes overlooked or misrepresented in ALD reports, nucleation is also critical for multicomponent ALD...
    Resource Type:
    Masters Thesis
    Full Text:
    . John Labram, Prof. Li-Jing (Larry) Cheng, and my Graduate Council Representative, Prof. William (Bill