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Filtering by: Subject Thin film devices Contributor Tate, Janet

Spectroscopic Ellipsometry on Thin Films of TiO2: Comparing Cauchy and Cody-Loretnz Models in CompleteEASE

Creator:

Kreb, Joseph

Abstract:

Spectroscopic ellipsometry (SE) is used to characterize amorphous and crystalline thin films of TiO2. Amorphous precursor films of TiO2 are deposited by radio frequency magnetron sputtering on fused silica and silicon substrates. Annealing the amorphous precursor films induces them to crystallize into either pure or mixed phases of the three...

Resource Type:

Undergraduate Thesis

Full Text:

deposition parameters. A set of thin film samples has been made at varying sputtered deposition parameters