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Creator:: Smith, Sean W., Wang, Wei, Keszler, Douglas A., and Conley, John F., Jr.
Abstract:: A comparison was made of Al₂O₃ films deposited on Si via prompt inorganic condensation (PIC) and atomic layer deposition (ALD). Current–voltage measurements as a function of annealing temperature indicate that the solution-processed PIC films, annealed at 500°C, exhibit lower leakage and roughly equivalent breakdown strength in comparison to ALD films....
Resource Type:: Article
Full Text:: ), 041501. doi:10.1116/1.4874806 10.1116/1.4874806 American Vacuum Society Version of Record http

Creator:: Austin, Dustin Z., Allman, Derryl, Price, David, Hose, Sallie, Saly, Mark, and Conley, John F., Jr.
Abstract:: Bismuth oxide thin films were deposited by atomic layer deposition using Bi(OCMe₂ [superscript i]Pr)₃ and H₂O at deposition temperatures between 90 and 270°C on Si₃N₄, TaN, and TiN substrates. Films were analyzed using spectroscopic ellipsometry, x-ray diffraction, x-ray reflectivity, high-resolution transmission electron microscopy, and Rutherford backscattering spectrometry. Bi₂O₃ films deposited...
Resource Type:: Article
Full Text:: & Technology A, 32(1), 01A113. doi:10.1116/1.4840835 10.1116/1.4840835 American Institute of Physics

Creator:: Alimardani, Nasir, McGlone, John M., Wager, John F., and Conley, John F., Jr.
Abstract:: Metal–insulator–metal diodes with Nb₂O₅ and Ta₂O₅ insulators deposited via atomic layer deposition are investigated. For both Nb₂O₅ and Ta₂O₅, the dominant conduction process is established as Schottky emission at small biases and Frenkel–Poole emission at large biases. Fowler–Nordheim tunneling is not found to play a role in determining current versus...
Resource Type:: Article
Full Text:: Vacuum Science & Technology A, 32(1), 01A122. doi:10.1116/1.4843555 10.1116/1.4843555 American

Creator:: Smith, Sean W., Buesch, Christian, Matthews, David J., Simonsen, John, and Conley, John F., Jr.
Abstract:: Cellulose nanocrystal (CNC) aerogels are coated with thin conformal layers of Al₂O₃ using atomic layer deposition to form hybrid organic/inorganic nanocomposites. Electron probe microanalysis and scanning electron microscopy analysis indicated the Al₂O₃ penetrated more than 1500 μm into the aerogel for extended precursor pulse and exposure/purge times. The measured profile...
Resource Type:: Article
Full Text:: . Journal of Vacuum Science & Technology A, 32(4), 041508. doi:10.1116/1.4882239 10.1116/1.4882239

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