Search Constraints

Start Over
Filtering by: Subject Photolithography Remove constraint Subject: Photolithography Creator Frederick, Ryan T. Remove constraint Creator: Frederick, Ryan T.

Search Results

  • Metal Oxide Cluster Chemistries for Next Generation Nanomanufacturing

    Creator:
    Frederick, Ryan T.
    Abstract:
    Metal oxide clusters are promising inorganic photoresists in next generation nanomanufacturing because of their potential for high-resolution and low line-edge roughness patterning, and exceptional sensitivity to extreme ultraviolet (EUV) radiation. In EUV patterning, absorption of EUV radiation leads to electron emission that serve as a primary species for driving radiation...
    Resource Type:
    Dissertation
    Full Text:
    1.3 Patterning scheme in photolithography. Radiation species will leave the exposed regions more