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Filtering by: Subject Silicon compounds Creator Hsu, Chia Chang, 1967

Kinetic study of Si(NH) synthesis via low temperature vapor phase reaction of SiCl and NH in a fluidized bed reactor

Creator:

Hsu, Chia-Chang, 1967-

Resource Type:

Masters Thesis

Full Text:

FLUIDIZED BED REACTOR CHAPTER 1 INTRODUCTION Thermal decomposition of silicon diimide (Si(NH)2) is