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Filtering by: Creator Khanna, Satya Pal Remove constraint Creator: Khanna, Satya Pal Creator Khanna, Satya Pal Remove constraint Creator: Khanna, Satya Pal Resource Type Masters Thesis Remove constraint Resource Type: Masters Thesis

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  • The concentration profile of diffused radio-active antimony in a silicon-dioxide layer

    Creator:
    Khanna, Satya Pal
    Abstract:
    The selective masking effect of a thermally grown layer of silicon dioxide has been widely utilized as a technique for controlling the geometry and impurity concentration in semi-conductor device technology. It is also recognized that the passivation of the silicon surface by the vitreous silicon dioxide envelope protects the underlying...
    Resource Type:
    Masters Thesis
    Full Text:
    in a silicon-dioxide layer AN ABSTRACT OF THE THESIS OF SATYA PAL KHANNA for the M. S. in