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Filtering by: Creator Hoshino, Ken Degree Name Doctor of Philosophy (Ph.D.)

Fabrication process assessment and negative bias illumination stress study of IGZO and ZTO TFTs

Creator:

Hoshino, Ken

Abstract:

Indium-gallium-zinc oxide (IGZO) and zinc-tin oxide (ZTO) are investigated for thin-film transistor (TFT) applications. Negative bias illumination stress (NBIS) is employed for electrical stability assessment. Unpassivated IGZO and ZTO TFTs suffer from severe NBIS instabilities. Zinc-tin-silicon oxide is found to be an effective passivation layer for IGZO and ZTO TFTs,...

Resource Type:

Dissertation