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Filtering by: Creator Hoshino, Ken License All rights reserved

Fabrication process assessment and negative bias illumination stress study of IGZO and ZTO TFTs

Creator:

Hoshino, Ken

Abstract:

Indium-gallium-zinc oxide (IGZO) and zinc-tin oxide (ZTO) are investigated for thin-film transistor (TFT) applications. Negative bias illumination stress (NBIS) is employed for electrical stability assessment. Unpassivated IGZO and ZTO TFTs suffer from severe NBIS instabilities. Zinc-tin-silicon oxide is found to be an effective passivation layer for IGZO and ZTO TFTs,...

Resource Type:

Dissertation
Instability and temperature-dependence assessment of IGZO TFTs

Creator:

Hoshino, Ken

Abstract:

Amorphous oxide semiconductors (AOSs) are of great current interest for thin-film transistor (TFT) channel layer applications. In particular, indium gallium zinc oxide (IGZO) is under intense development for commercial applications because of its demonstrated high performance at low processing temperatures. The objective of the research presented in this thesis is...

Resource Type:

Masters Thesis