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Filtering by: Creator Tiedke, S. Rights Statement Copyright Not Evaluated

Electrode size dependence of piezoelectric response of lead zirconate titanate thin films measured by double beam laser interferometry

Creator:

Sivaramakrishnan, S., Mardilovich, P., Mason, A., Roelofs, A., Schmitz-Kempen, T., and Tiedke, S.

Abstract:

The electrode size dependence of the effective large signal piezoelectric response coefficient (d(33,f)) of lead zirconate titanate (PZT) thin films is investigated by using double beam laser interferometer measurements and finite element modeling. The experimentally observed electrode size dependence is shown to arise from a contribution from the substrate. The...

Resource Type:

Article