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Microwave plasmas
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1990-1999
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Etch products dynamics of polyphenylene oxide laminates using a CF₄/O₂/Ar downstream microwave plasma
Creator:
Hsu, Chia-Chang
Resource Type:
Dissertation
Full Text:
Polyphenylene Oxide Laminates Using a CF4/0,/Ar Downstream
Microwave
Plasma
. Abstract approved: Milo D
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Academic Affiliation
Chemical Engineering
1
Advisor
Koretsky, Milo D.
1
Commencement Year
1999
1
Creator
Hsu, Chia Chang
1
Date
1999
1
Decade
1990-1999
[remove]
1
Degree Field
Chemical Engineering
1
Degree Level
Doctoral
1
Degree Name
Doctor of Philosophy (Ph.D.)
1
Language
English [eng]
1
Non-Academic Affiliation
Oregon State University. Graduate School
1
Peer Reviewed
No
1
Resource Type
Dissertation
1
Rights Statement
Copyright Not Evaluated
1
Subject
Microwave plasmas
1
Plasma etching
1