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Filtering by: Committee Member Levien, Keith L. Remove constraint Committee Member: Levien, Keith L. Decade 2000-2009 Remove constraint Decade: 2000-2009 Degree Field Chemical Engineering Remove constraint Degree Field: Chemical Engineering

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  • Roles of gas and solid components in the direct nitridation of silicon

    Creator:
    Pavarajarn, Varong
    Abstract:
    The factors influencing the direct nitridation of silicon, including the effects of the native oxide layer covering the surface of silicon, the effects of hydrogen contained in the nitridation gas and the catalytic effects of metals added to the raw material silicon, were investigated, using a tubular flow reactor and...
    Resource Type:
    Dissertation
    Full Text:
    . Keith Levien, Dr. Roger Nielsen and Dr. Brian Wood for their valuable time and suggestions. I would