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  • Reaction Pathways of Oxo-Hydroxo Group 5 Clusters to Metal Oxide Thin Films

    Creator:
    Mansergh, Ryan H.
    Abstract:
    Oxo-hydroxo Group 5 metal clusters are an untapped resource to study and advance aqueous solution processing of metal oxide thin films. The tetramethylammonium (TMA) hexatantalate salt (TMA6[H2Ta6O19]) yields dense Ta2O5 films (~95% of the bulk ß-Ta2O5 density) with atomically smooth surfaces (<4 Å root mean square surface roughness). This same...
    Resource Type:
    Dissertation
    Full Text:
    200 °C for 4 min.………………………………………………… 133 5.8 Magnified TPD signals for trimethylamine (m/z = 58