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Filtering by: Committee Member Graham, Matt Degree Field Chemistry

Synthesis and Solution Characterization of Metal-Oxo Photoresist Precursors

Creator:

Hutchison, Danielle C.

Abstract:

Metal-oxo clusters can be described as soluble pieces of metal-oxide frameworks. Currently, metal-oxo clusters are being considered as solution-based precursors for extreme ultraviolet (EUV, 13.5 nm) photoresist materials, which are a crucial component in the fabrication of microelectronic devices. Two different photoresist precursor systems have been investigated – alkyltin clusters...

Resource Type:

Dissertation