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Filtering by: Creator Booker, John Remove constraint Creator: Booker, John Degree Field Electrical and Electronics Engineering Remove constraint Degree Field: Electrical and Electronics Engineering Degree Name Doctor of Philosophy (Ph.D.) Remove constraint Degree Name: Doctor of Philosophy (Ph.D.)

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  • Vacuum evaporated dielectrics in MOS structures

    Creator:
    Delzer, Dennis Richard
    Abstract:
    Vacuum evaporated dielectrics for use in MOS structures were studied in this research project. Dielectric films were deposited on substrates by electron bombardment evaporation of sapphire and quartz source materials. These deposited films were studied using infrared spectroscopy, index of refraction, density, and dielectric constant measurements. Etching tests were also...
    Resource Type:
    Dissertation
    Full Text:
    research. Gratitude is also expressed to Mr. John Kelley of the U.S. Bureau of Mines for providing the