Search Constraints

Start Over
Filtering by: Subject Silicon compounds Remove constraint Subject: Silicon compounds Degree Field Electrical and Electronics Engineering Remove constraint Degree Field: Electrical and Electronics Engineering Non-Academic Affiliation Oregon State University. Graduate School Remove constraint Non-Academic Affiliation: Oregon State University. Graduate School

Search Results

  • Vacuum deposition of silicon monoxide for capacitors

    Creator:
    Lo, Joseph Ping Kwan
    Abstract:
    The experimental procedure for evaporating silicon monoxide together with the methods for measuring the film thickness have been investigated. The effects of various process parameters on the rate of deposition, such as source temperature and source-substrate distance, have been studied. The uniformity of silicon monoxide films deposited by this particular...
    Resource Type:
    Masters Thesis
    Full Text:
    Vacuum deposition of silicon monoxide for capacitors AN