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Filtering by: Advisor Engle, John F. Remove constraint Advisor: Engle, John F. Degree Level Doctoral Remove constraint Degree Level: Doctoral File Format application/pdf Remove constraint File Format: application/pdf

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  • Development of oxide semiconductors : materials, devices, and integration

    Creator:
    Chiang, Hai Q.
    Abstract:
    The aim of this dissertation is to develop oxide semiconductors by radio-frequency sputtering for thin-film transistor (TFT) applications. A variety of oxide semiconductors are used as the TFT channel layer, including indium gallium oxide (IGO), zinc tin oxide (ZTO), and indium gallium zinc oxide (IGZO). The variety of materials used...
    Resource Type:
    Dissertation
    Full Text:
    : John F. Wager The aim of this dissertation is to develop oxide semiconductors by radio-frequency