The goal of this thesis study is to develop an activated reactive evaporation (ARE) system and to demonstrate its utility by fabricating-alternating current thin-film electroluminescent (ACTFEL) oxide phosphor devices. ARE entails evaporation in an activated gas. The main ARE system components are three thermal evaporation sources, a microwave power supply,...
The use of a permeable membrane to mechanically constrain a film of water with an area of 12 cm² and a thickness of 150 μm in a gas/liquid contactor was investigated. The membrane separated the vapor and liquid phases, and a stiffener
plate made from a gas-permeable material was used...