Carbon nanotubes (CNTs) are grown using plasma enhanced chemical vapor deposition (PECVD). A modified radio frequency (RF) parallel-plate plasma etching system serves as the growth reactor. The effects of process parameters, including temperature, pressure, and C2H2:NH3 ratio, are studied. CNTs are grown on glass substrates with Al underlayers and Ni...
Surface acoustic wave (SAW) sensors are versatile devices that can be configured to sense a variety of measurands such as temperature and pressure. The potential use of surface acoustic wave devices for magnetic field detection is explored in this study. Compared to current magnetic field sensors, a sensor based on...