Index Catalog // ScholarsArchive@OSU

Start Over

Filtering by: Committee Member Plant, Tom Peer Reviewed No Subject Amorphous semiconductors -- Design and construction

Nontraditional amorphous oxide semiconductor thin-film transistor fabrication

Creator:

Sundholm, Eric Steven

Abstract:

Fabrication techniques and process integration considerations for amorphous oxide semiconductor (AOS) thin-film transistors (TFTs) constitute the central theme of this dissertation. Within this theme three primary areas of focus are pursued. The first focus involves formulating a general framework for assessing passivation. Avoiding formation of an undesirable backside accumulation layer...

Resource Type:

Dissertation