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Vacuum deposition of silicon monoxide for capacitors

Creator:

Lo, Joseph Ping Kwan

Abstract:

The experimental procedure for evaporating silicon monoxide together with the methods for measuring the film thickness have been investigated. The effects of various process parameters on the rate of deposition, such as source temperature and source-substrate distance, have been studied. The uniformity of silicon monoxide films deposited by this particular...

Resource Type:

Masters Thesis

Full Text:

Vacuum deposition of silicon monoxide for capacitors AN
Kinetic study of Si(NH) synthesis via low temperature vapor phase reaction of SiCl and NH in a fluidized bed reactor

Creator:

Hsu, Chia-Chang, 1967-

Resource Type:

Masters Thesis

Full Text:

FLUIDIZED BED REACTOR CHAPTER 1 INTRODUCTION Thermal decomposition of silicon diimide (Si(NH)2) is
Direct synthesis of tetramethoxysilane from silicon fines

Creator:

Vongpayabal, Panut

Resource Type:

Masters Thesis

Full Text:

Tetramethoxysilane from Silicon Fines. Abstract approved: Shoichi Kimura It is an urgent need to find methods to
The electrochemical synthesis and characterization of graphite intercalation compounds and luminescent porous silicon

Creator:

Zhang, Zhengwei

Resource Type:

Dissertation

Full Text:

Characterization of Graphite Intercalation Compounds and Photo luminescent Porous Silicon. Abstract approved