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Filtering by: Rights Statement In Copyright Subject Semiconductors -- Impurity distribution

Fourier deep level transient spectroscopy and its application to gold in silicon

Creator:

Divekar, Prasad K.

Abstract:

A primarily software based Fourier Deep Level Transient Spectroscope (FDLTS) is built. The raw capacitance transient is acquired and digitized using capacitance meter HP4280A whereas the signal analysis is done using a customized software module. The software module calculates both the conventional DLTS spectrum and the Fourier DLTS spectrum. This...

Resource Type:

Masters Thesis