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Filtering by: Creator Schlieder, Tyler D. Subject Atomic layer deposition

Assessment of Barrier Heights between ZrCuAlNi Amorphous Metal and SiO₂, Al₂O₃, HfO₂, and ZrO₂ using Internal Photoemission Spectroscopy

Creator:

Klarr, Tyler D.

Abstract:

As scaling of silicon (Si) based devices approaches fundamental limits, thin film metal-insulator-metal (MIM) tunnel diodes are attracting interest due to their potential for high speed operation. Because operation of these devices is based on tunneling, electrode / interfacial roughness is critical. Recently, it was shown that combining ultra-smooth bottom...

Resource Type:

Masters Thesis

Full Text:

AN ABSTRACT OF THE THESIS OF Tyler D. Klarr for the