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Filtering by: Creator Husurianto, Sjamsie Subject Chemical vapor deposition

Process optimization and electrical characterization of ZnS:Mn electroluminescent phosphors deposited by halide transport chemical vapor deposition

Creator:

Husurianto, Sjamsie

Abstract:

Process development of halide transport chemical vapor deposited (HTCVD) ZnS:Mn thin film has been studied. To this end, electrical characterization of HTCVD ZnS:Mn electroluminescent devices has been used. Process optimization focused on a simple design of experiment (DOE) with brightness as the major response. Deposition parameters such as HCl and...

Resource Type:

Masters Thesis

Full Text:

Sjamsie Husurianto for the degree of Master of Science in Chemical Engineering presented on June 18, 1998