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Filtering by: Subject Dielectrics Subject Nanostructured materials

Atomic layer deposition of nanolaminate high-κ gate dielectrics for amorphous-oxide semiconductor thin film transistors

Creator:

Triska, Joshua B.

Abstract:

Nanolaminate dielectrics combine two or more insulating materials in a many-layered film. These structures can be made to significantly outperform films composed of a single one of their constituent materials by adjusting the composition ratio, arrangement, and size of the component layers. In this work, atomic layer deposition (ALD) is...

Resource Type:

Masters Thesis
Fabrication and geometrical characterization of metal and metal-dielectric composite periodic nanostructures

Creator:

Bhowmik, Siddhartha

Abstract:

Periodic metal and metal-dielectric composite nanostructures have been of interest from the field of plasmonics and metamaterial fabrication. In order to exploit the behavior of these unique materials in the visible region of the optical spectrum, these structures need to be significantly shorter than the wavelength of response, and hence...

Resource Type:

Dissertation