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Filtering by: Committee Member Subramanian, Mas Subject Piezoelectric materials

Development of perovskite thin films for use in piezoelectric based microelectromechanical systems

Creator:

Shelton, Christopher T.

Abstract:

The lead-zirconate-titanate (PZT) solid solution system is currently the workhorse of piezoelectric-based microelectromechanical systems (MEMS) research. Among bulk materials it is known to be one of the strongest piezoelectrics, with extremely high piezoelectric coefficients and electro-mechanical coupling factors. Reproducing these exceptional qualities in thin film form, however, requires precise tuning...

Resource Type:

Masters Thesis
Development of bi-based lead-free piezoelectric materials : thin film piezoelectric materials via PVD and CSD routes

Creator:

Jeon, Yu Hong

Abstract:

Piezoelectric materials have been widely used in electromechanical actuators, sensors, and ultrasonic transducers. Among these materials, lead zirconate titanate Pb(Zr[subscript 1‐x]Ti[subscript x])O₃ (PZT) has been primarily investigated due to its excellent piezoelectric properties. However, environmental concerns due to the toxicity of PbO have led to investigations into alternative materials systems....

Resource Type:

Dissertation

Full Text:

 committee members Dr. David Cann, Dr. Mas  Subramanian, Dr. Janet Tate, and Dr. Adam Higgins for their