Fabrication techniques and process integration considerations for amorphous oxide semiconductor (AOS) thin-film transistors (TFTs) constitute the central theme of this dissertation. Within this theme three primary areas of focus are pursued.
The first focus involves formulating a general framework for assessing passivation. Avoiding formation of an undesirable backside accumulation layer...
Understanding groundwater flow in faulted and fractured rock is an important frontier in the field of environmental remediation and in the management of water resources. One example of a site where this is particularly evident is the Santa Susana Field Laboratory (SSFL) in Ventura County, CA where environmental remediation activities...
Metal-oxo clusters can be described as soluble pieces of metal-oxide frameworks. Currently, metal-oxo clusters are being considered as solution-based precursors for extreme ultraviolet (EUV, 13.5 nm) photoresist materials, which are a crucial component in the fabrication of microelectronic devices. Two different photoresist precursor systems have been investigated – alkyltin clusters...
Polyoxometalates are discrete anionic oxo clusters of the Group V and VI transition metals that can be conceptualized as molecular metal oxides. Because they are pairable with any alkali cation, a great deal of fundamental chemistry can be gleaned from their study, including solubility trends and insight into cation binding...
Advances in energy technologies and electronics have typically occurred through either heightened performance or cost reduction. This dissertation explores both routes through a series of fundamental material studies that may contribute to the enabling of next generation devices. Solution based syntheses and deposition of chemical products offer a low cost...
The two sulfur isotopomers of sulfur trioxide, ³²S¹⁶O₃ and ³⁴S¹⁶O₃, have been studied via high resolution infrared and Coherent anti-Stokes Raman (CARS) spectroscopy. The v₁ symmetric SO stretching Q-branches observed by the latter are quite different, being especially complex for ³²S¹⁶O₃ Understanding this band structure required analysis of infrared-active hot...
This thesis investigates lithogenic sediments on the Siberian Arctic shelf, their sources, modes of dispersal, transport pathways and post-depositional diagenetic alteration. Working with cores collected from the Chukchi, East Siberian and Laptev Seas, we characterize surface-sediment elemental chemistry and clay mineralogy. We identify five regions with endmember sedimentary compositions. Comparing...
This thesis presents basic studies, including structural, optical and transport measurements, on novel chalcogenide powders and single crystals. BiCuOSe crystals have been synthesized for the first time. The crystal structure of BiCuOSe has been refined and the optical band gap has been measured to be 0.83eV. Crystal structure refinements of...
The focus of this thesis is the investigation of thin-film transistors (TFTs) based on amorphous oxide semiconductors (AOSs) in two circuit applications. To date, circuits implemented with AOS-based TFTs have been primarily enhancement-enhancement inverters, ring oscillators based on these inverters operating at peak frequencies up to ~400 kHz, and two-transistor...