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Optical coatings
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Thermal annealing of Mo/Si multilayers to assess the stability relevant to soft x-ray projection lithography
Creator:
Viliardos, Michael A.
Resource Type:
Masters Thesis
Full Text:
abrupt interfaces (no roughness). Best fitting of the unannealed data was obtained using
optical
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Academic Affiliation
Mechanical Engineering
1
Advisor
Kassner, Michael E.
1
Commencement Year
1993
1
Committee Member
Burhanuddin, S.
1
Kennedy, T.
1
Warnes, W.
1
Creator
Viliardos, Michael A.
1
Date
1992
1
Decade
1990-1999
1
Degree Field
Mechanical Engineering
1
Degree Level
Master's
1
Degree Name
Master of Science (M.S.)
1
Language
English [eng]
1
Non-Academic Affiliation
Oregon State University. Graduate School
1
Peer Reviewed
No
1
Resource Type
Masters Thesis
1
Rights Statement
Copyright Not Evaluated
1
Subject
Optical coatings
1
Reflectance
1
Thin films, Multilayered
1
X-ray lithography
1
X-ray optics
1