Design, Fabrication and Characterization of Narrowband Aluminum Plasmonic Grating Filter Array for Spectroscopy in Visible Light Range

Graduate Project

Public Deposited

Citeable URL: https://ir.library.oregonstate.edu/concern/graduate_projects/p26772354

Descriptions

Attribute Name	Values
Creator	Shashi, Farzana Hasan
Abstract	Metal grating based plasmonic filters are widely researched for their unique properties of field enhancement and localization of light beyond diffraction limit. However, the plasmonic grating filters reported in literature mostly have broadband outputs making them unsuitable for spectroscopy. In this project, we have designed, fabricated, and characterized an array of 20 plasmonic filters having narrow transmission bands with an average of 17nm FWHM covering the whole visible light range. These filters were fabricated on a single quartz substrate having two thin dielectric layers of Si3N4 and SiO2 along with aluminum gratings on top. The aluminum gratings for all to filters were patterned using a single step focused ion beam etching making the fabrication process time and cost effective. The filters were characterized using a fiber-based testing setup and later used for high-fidelity signal reconstruction integrating the device with a CMOS imager.
Resource Type	Capstone Project
Date Issued	2020
Degree Level	Master's
Degree Name	Master of Science (M.S.)
Degree Field	Electrical and Computer Engineering
Degree Grantor	Oregon State University
Commencement Year	2020
Advisor	Wang, Alan
Committee Member	Johnston, Matthew Cheng, Li-Jing
Academic Affiliation	Electrical Engineering and Computer Science
Rights Statement	In Copyright
Publisher	Oregon State University
Peer Reviewed	No
Language	English [eng]

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