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Filtering by: Subject Photolithography Remove constraint Subject: Photolithography Advisor Keszler, Douglas A. Remove constraint Advisor: Keszler, Douglas A.

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  • Metal-oxo Clusters as Novel Photolithographic Materials: How Understanding the Chemistry of HafSOx Informs Next-Generation Patterning Systems

    Creator:
    Amador, Jenn M.
    Abstract:
    The solution chemistry and kinetic behavior of hafnium peroxy sulfate solutions ("HafSOx") is described in terms of peroxide content and solution speciation. Additionally, thin film behavior, including thermal behavior and solubility, is characterized, and a mechanism of patterning is presented, as well as parameters that should be considered when looking...
    Resource Type:
    Dissertation
    Full Text:
    that shift are critically important. Photolithography depends on sharp contrast between the soluble

  • Photoresist and ion-exchange chemistry of HafSOx

    Creator:
    Telecky, Alan J.
    Abstract:
    The chemistry of hafnium oxide based and materials are described in the context of ion exchange and lithography. HafSOx, represented by the composition HfO₂₋[subscript x](SO₄)x, is described to possess a significant capacity towards ion exchange in acidic and basic solutions, enabling films of HafSOx to be cleanly and readily be...
    Resource Type:
    Dissertation
    Full Text:
    Photolithography................................................... 15 Modern Lithography Overview