The influence of surface fields on the breakdown voltage
is studied experimentally for p⁺-n silicon diodes with
a junction depth of 0.5μ in order to improve the curvature-
limited breakdown of the diffused, shallow-collector
junction of a microwave transistor.
Devices with a gap in the gate metal electrode are
also...
The properties of evaporated aluminum-oxide films were investigated. The characteristics of MOS devices
made with single-layer aluminum-oxide films and double-layer
films which were made by evaporating aluminum oxide
over thermally-grown silicon dioxide as gate insulation
have been investigated. Vacuum-evaporated aluminum oxide
has features which are suitable for fabricating MOS devices....
The properties of flash- evaporated films of GaAs
and GaP were studied in this investigation. Films were
grown at various substrate temperatures, source temperatures,
source-to-substrate distances and rates of deposition
and were evaluated as to their structural,
optical and electric properties.
It was found that substrate temperature was the
major...
In this paper, the theory of metal-semiconductor contacts was
applied to metal contacts on gallium arsenide. A model was discussed
which proposed that the contact resistance was due to a highly
resistive region between the metal and the semiconductor. In order
to evaluate this resistance, a technique using a VHF...
Some important factors that affect the dimensional
control of oxide films on silicon were studied. Both N- and
P-type silicon with resistivities in the range of
0.014 to 200 ohm-cm and a (111) surface orientation
were employed in this experiment. The etching rates of
silicon dioxide in hydrofluoric acid (111)...
The MOS tetrode transistor is studied in this project.
This device is ideally suited for high frequency and
switching application.
In effect it is the solid state
analogy of a multigrid vacuum tube performing a very useful
multigrid function.
A new structure is developed for
p-channel 10 ohm-cm. silicon substrate...
This paper presents an investigation of the power needs and
impedance-matching techniques involved when heating small charges of
relatively high-resistivity semiconductor materials. Topics of discussion
also include a brief section on the theoretical basis for
zone refining, relative merits of resistance and induction heating,
travel mechanism requirements, and work coil...
The theoretical aspects and fabrication techniques of
a new surface field-effect transistor were investigated.
The new MOS-transistor uses a three-layer structure
similar to those found in bipolar transistors. The new MOS
structure introduces an impurity gradient in the channel
region of the transistor and also makes it possible to reduce...
This paper analyzes the theory and performance of a
Schottky barrier diode detector used over a frequency range
extending from a few kilohertz into the gigahertz region.
The process of large signal rectification is analyzed with
the simplified detector circuit. Phenomena which can
affect the rectification process at high frequencies,...
The use of double-diffused n-type MOS transistor
(DN-MOS) in a complementary MOS random-access-memory (CMOS
RAM) cell is the main objective of this investigation.
DN-MOS transistors and conventional p-channel MOS
transistors on the same chip have been successfully fabricated.
Process sequence effects on device threshold voltage
and channel length are discussed....
The selective masking effect of a thermally grown layer of silicon
dioxide has been widely utilized as a technique for controlling the
geometry and impurity concentration in semi-conductor device technology.
It is also recognized that the passivation of the silicon surface
by the vitreous silicon dioxide envelope protects the underlying...
A technique was investigated in which a silicon crystal was
used as a very sensitive detector of sub-nanogram quantities of
boron. The unknown quantity of boron was spread uniformly on
the surface of an n-type silicon wafer which was then baked for
diffusion. The measured depth of the p-n junction...
Problems with Hall devices for instructional use in undergraduate laboratories stimulated this investigation for development of rugged, easily constructed, inexpensive, electrically reproducible Hall devices with high output voltage. Silicon was chosen as the Hall-plate material on the basis of cost and availability. Advantages and disadvantages of various plate shapes, sizes,...
This paper is concerned with the determination of
gallium arsenide resistivity by measurement of attenuation of microwave energy at 7500 megacycles transmitted
through a slice.
The first section of this paper describes gallium
arsenide properties as compared to silicon, germanium,
silicon carbide, and diamond. A description is then
given of...
Four methods for the simultaneous fabrication of
field-effect and bipolar transistors have been investigated.
The basic process involves obtaining two different
junction depths by a single diffusion. This was
accomplished by the techniques of (1) partial masking,
(2) two depositions, (3) etched channels, and (4) oxide
depletion.
The first three...
Wideband tunnel-diode amplifiers using common-base
transistor stages for isolation were investigated for
stability criteria, frequency response, and the effects
of temperature and voltage supply fluctuations. For the
first time the full frequency spectrum of a tunnel-diode,
from d-c to the gigahertz (GHz) range, was able to be
utilized in an...
The extremely fast ionization process in semiconductors offers a means of generating pulses that have sub -nanosecond rise times and high peak powers. There are several important applications of these pulses which require the duration of the generated pulse to be variable. This thesis investigates three methods of producing variable...
The exponential characteristic of the base-emitter
Junction in bipolar transistors was used to make an
accurate and fairly temperature independent multiplier.
Using hybrid-pi transistor models and ECAP, a
bandwidth of 350 MHz was predicted. Linearity is
limited by emitter degeneration in the input differential
stage rather than by the small...
This paper is a study of various linear Metal-Oxide-
Semiconductor integrated circuit configurations with the
goal of improving their operation. The operation of MOS
devices is covered including their use as load devices
to replace diffused resistors. The advantages and disadvantages
of the resulting circuits as well as possible
physical...
This thesis presents some experimental results for
producing controlled PN and NPN diffused structures in
silicon by varying the strength of the diffusion sources.
Boron diffusions were carried out in a N₂ atmosphere at
1200°C with 10%, 20%, 30% and 40% B₂0₃ in silicic acid as
sources. Phosphorus diffusions were...
This thesis presents a limited investigation of the effects
of various etches on the surface properties of silicon. Surface
recombination velocities of silicon under different etching treatments
are compared by using the photoelectromagnetic effect. A
measure of the minority carriers lifetime by the photoconductive
decay method provides another means of...
Vacuum evaporated dielectrics for use in MOS structures
were studied in this research project. Dielectric
films were deposited on substrates by electron bombardment
evaporation of sapphire and quartz source materials.
These deposited films were studied using infrared spectroscopy,
index of refraction, density, and dielectric constant
measurements. Etching tests were also...
The theoretical characteristics of space-charge-limited
currents in solids are reviewed, and a survey of
suitable dielectric materials and experimental space-charge-limited devices is presented.
The properties of the gold-silicon contact as used
in space-charge-limited devices were experimentally investigated.
It was found that the observed characteristics
could be explained on the basis...
A non-volatile electrically alterable read-only memory using
an MOS field effect transistor with a threshold voltage which depended
upon the position of ionic charges for its memory was fabricated.
The conventional silicon dioxide layer was replaced by a composite
layer consisting of thermal silicon dioxide, electron beam
evaporated aluminum oxide,...
This paper is a study of the design of an integrated MOS addressing
circuit by using the modified two-phase dynamic shift register. This modified circuit is compared to the conventional two-phase
dynamic SR and discussed briefly. The resulting circuit shows
several advantages to improve the essential conditions of integrated
circuit...
The experimental procedure for reactively sputtering
films of silicon nitride together with the methods for
measuring the film thickness have been investigated.
Some of the properties of these nitride films were studied.
These properties included: infrared spectrum,
etching properties, and index of refraction. The adherence
of the films was also...
This thesis investigates a way to fabricate P-N junctions by
percussive welding. The theoretical basis of percussive welding, design
considerations of the apparatus used, and the electrical characteristics
of the junctions were the main objectives of this investigation.
P-type silicon wafers and gold wire doped with arsenic as a
N-type...
The force, temperature, and time relationships were
investigated by using oscilloscope measurement techniques. Force was measured using a strain gage and the dynamic
response recorded with a polaroid oscilloscope camera.
Temperature was measured with a tungsten-rhenium thermocouple
and recorded in the same manner. Residual stress
measurements were made to determine...
Low temperature noise measurements on junction field-effect
transistors tend to substantiate a theory of low frequency field-effect
transistor noise based on the presence of generation centers in the
gate-channel depletion region. Measurements of device noise voltage
versus temperature reveal pronounced maxima and minima over the
temperature range of 300° K...
Application of automatic production techniques to the fabrication
of semiconductor devices has been somewhat limited by the requirements
of conventional alloying techniques. These alloying techniques
require an excessive amount of individual handling.
This thesis investigates the feasibility of applying percussive
welding to the fabrication of metal-semiconductor contacts, as a
solution...