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Chemistry of High-Resolution Organotin Patterning Materials

Creator:: Kenane, Nizan
Abstract:: Organotin clusters have attracted notable attention for use as inorganic photoresists. This dissertation discerns dimeric and dodecameric organotin clusters, [(n-C₄H₉Sn)(OH)(H₂O)Cl₂]₂ (Sn₂) and [(n-C₄H₉Sn)₁₂O₁₄ (OH)₆ ]+ (Sn₁₂), both of which are stable hydrolysis and condensation products of n-C₄H₉SnCl₃. This work identifies Sn₂ as a superior precursor choice for solution deposition of...
Resource Type:: Dissertation

Metal-oxo Clusters as Novel Photolithographic Materials: How Understanding the Chemistry of HafSOx Informs Next-Generation Patterning Systems

Creator:: Amador, Jenn M.
Abstract:: The solution chemistry and kinetic behavior of hafnium peroxy sulfate solutions ("HafSOx") is described in terms of peroxide content and solution speciation. Additionally, thin film behavior, including thermal behavior and solubility, is characterized, and a mechanism of patterning is presented, as well as parameters that should be considered when looking...
Resource Type:: Dissertation

Aqueous niobium chemistry at low pH : new precursors for oxide thin films

Creator:: Park, Deok-Hie
Abstract:: Phosphate and peroxide stabilize new oxo-hydroxo niobium clusters in water at low pH. The clusters open a new chapter in aqueous niobium chemistry under acidic conditions. The clusters also produce atomically smooth, amorphous niobium oxide phosphate (NbPOx) thin films. Reaction pathways from cluster solutions to amorphous niobium oxide phosphate solids...
Resource Type:: Dissertation

Reaction Pathways of Oxo-Hydroxo Group 5 Clusters to Metal Oxide Thin Films

Creator:: Mansergh, Ryan H.
Abstract:: Oxo-hydroxo Group 5 metal clusters are an untapped resource to study and advance aqueous solution processing of metal oxide thin films. The tetramethylammonium (TMA) hexatantalate salt (TMA6[H2Ta6O19]) yields dense Ta2O5 films (~95% of the bulk ß-Ta2O5 density) with atomically smooth surfaces (<4 Å root mean square surface roughness). This same...
Resource Type:: Dissertation

Refractory Amorphous Metal Thin Films

Creator:: Olsen, Kristopher R.
Abstract:: Amorphous metal thin films lack the grain boundaries and dislocations present in crystalline metal films. As a result, amorphous metal films can be more mechanically robust, atomically smooth, and more resistant to chemical attack than crystalline metals. However, amorphous metals are meta-stable and subject to crystallization upon heating, thus limiting...
Resource Type:: Dissertation

New multi-functional chalcogenides for photovoltaic and thermoelectric materials

Creator:: Heo, Jaeseok
Abstract:: The subject of this PhD thesis is part of a research domain of great present interest in new semiconductor materials for photovoltaic and thermoelectric applications. This domain contains the elaboration and the study of both Cu-based chalcogenides bulk and thin-film samples, driven by materials design principles. One of the most...
Resource Type:: Dissertation

The effects of soaking HafSOx films in NaOH over varying time

Creator:: Lucchini, Stefan E.
Abstract:: HafSOx is a dielectric material that also functions as an insulator. It is able to be spin-coated onto a silicon substrate, creating a thin, amorphous film. It is very dense, which helps lead it to a high dielectric constant, making it ideal for electronic devices through the use of lithography....
Resource Type:: Presentation

Structure and properties of new, complex copper and zinc borates

Creator:: Smith, Robert W.
Resource Type:: Dissertation

Syntheses and structures of new inorganic borates

Creator:: Sun, Hongxing
Abstract:: Several new solid-state inorganic borates have been prepared and characterized. Single crystals of the simple orthoborate ScB0₃ were grown and its structure was determined by single-crystal X-ray methods. The new borates Li₃Sc(B0₃)₂, LaSc₃(B0₃)₄, NdSc₃(B0₃)₄, SrNaB0₃, and Li4Ln4MB90₂₃ (Ln = Y, Er, and Gd; M = Al and Ga) were identified...
Resource Type:: Dissertation

Synthetic, structural, and spectroscopic investigations of acentric laser hosts and ionic optical converters

Creator:: Reynolds, Thomas A. (Thomas Allen), 1959-
Resource Type:: Dissertation

ScholarsArchive@OSU

Chemistry of High-Resolution Organotin Patterning Materials

Metal-oxo Clusters as Novel Photolithographic Materials: How Understanding the Chemistry of HafSOx Informs Next-Generation Patterning Systems

Aqueous niobium chemistry at low pH : new precursors for oxide thin films

Reaction Pathways of Oxo-Hydroxo Group 5 Clusters to Metal Oxide Thin Films

Refractory Amorphous Metal Thin Films

New multi-functional chalcogenides for photovoltaic and thermoelectric materials

The effects of soaking HafSOx films in NaOH over varying time

Structure and properties of new, complex copper and zinc borates

Syntheses and structures of new inorganic borates

Synthetic, structural, and spectroscopic investigations of acentric laser hosts and ionic optical converters

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