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Filtering by: DOI 10.1116/1.4767124 Committee Member Herman, Gregory S.

The Design and Construction of a Cost-Effective Atomic Layer Deposition System for Thin Film Growth

Creator:

Hong, Youngjoon

Abstract:

This paper describes the construction and use of a cost-effective custom-built atomic layer deposition (ALD) system, as well as the investigation of aluminum oxide atomic layer deposition using trimethylaluminum and water. For this research, a cost-effective ALD system was constructed for less than $8,000 using existing parts that were given...

Resource Type:

Masters Thesis
Growth, Characterizations, and Applications of Patterned Nanostructured Thin Film

Creator:

Gao, Zhongwei

Abstract:

A unique microreactor-assisted nanomaterial synthesis and printing process was studied for the fabrication of patterned metal oxide nanostructured thin films. The process uses a continuous flow microreactor to control and generate a reactive chemical flux that was transported to a patterned microfluidic channel. The microreactor-assisted nanomaterial synthesis process can generate...

Resource Type:

Dissertation
Polyoxoniobates: fundamental solubility trend and their application in solution and on the surface of thin films

Creator:

Rahman, Tasnim

Abstract:

Polyoxometalates (POMs) are anions consisting of three or more early transition metals ™ (Gr V and VI) oxoanions (in their highest oxidation state) linked together by a shared oxygen bond to form a 3D framework. Polyoxometalates (POMs) are a rapidly growing class of metal oxo clusters with a wide range...

Resource Type:

Dissertation