Index Catalog // ScholarsArchive@OSU

Start Over

Filtering by: Creator Minshew, Hudson F. Degree Field Chemistry Subject Photolithography

Photoresist and ion-exchange chemistry of HafSOx

Creator:

Telecky, Alan J.

Abstract:

The chemistry of hafnium oxide based and materials are described in the context of ion exchange and lithography. HafSOx, represented by the composition HfO₂₋[subscript x](SO₄)x, is described to possess a significant capacity towards ion exchange in acidic and basic solutions, enabling films of HafSOx to be cleanly and readily be...

Resource Type:

Dissertation
Metal-oxo Clusters as Novel Photolithographic Materials: How Understanding the Chemistry of HafSOx Informs Next-Generation Patterning Systems

Creator:

Amador, Jenn M.

Abstract:

The solution chemistry and kinetic behavior of hafnium peroxy sulfate solutions ("HafSOx") is described in terms of peroxide content and solution speciation. Additionally, thin film behavior, including thermal behavior and solubility, is characterized, and a mechanism of patterning is presented, as well as parameters that should be considered when looking...

Resource Type:

Dissertation

Full Text:

complete, exposure can then occur. Exposure is usually conducted using a 193 nm Ar-F excimer laser