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Filtering by: Creator Hightree, Paul E. Degree Field Materials Science

Electrochemical etch characteristics of (100) silicon in tetramethyl ammonium hydroxide

Creator:

Watts, Paul E.

Abstract:

A study of potentiostatic and galvanostatic electrochemical etching of silicon in tetramethylammonium hydroxide (TMAH) has been carried out. In TMAH baths,, we find that biased (100) silicon etch rates increase 21% over OCP etch rates. For TMAH baths seasoned with silicon, biased silicon etch rates increase to 63% over those...

Resource Type:

Masters Thesis

Full Text:

AN ABSTRACT OF TIlE THESIS OF Paul E. Watts for the degree of