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Filtering by: Advisor Maguire, Douglas A Resource Type Presentation

The effects of soaking HafSOx films in NaOH over varying time

Creator:

Lucchini, Stefan E.

Abstract:

HafSOx is a dielectric material that also functions as an insulator. It is able to be spin-coated onto a silicon substrate, creating a thin, amorphous film. It is very dense, which helps lead it to a high dielectric constant, making it ideal for electronic devices through the use of lithography....

Resource Type:

Presentation