Graduate Thesis Or Dissertation
 

Impurity effect on magnetism of nickel for under bump metallization via magnetron sputtering

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https://ir.library.oregonstate.edu/concern/graduate_thesis_or_dissertations/bn999958n

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  • Nickel or nickel alloys are common materials used in under bump metallization (UBM) in flip chip technology. Nickel is used because of its slow reaction rate with tin-based solder at elevated temperatures. However, nickel is ferromagnetic at room temperature, hence cannot be easily deposited with magnetron sputtering. In this study, small quantities of titanium and vanadium were added to nickel via co-sputtering to try to form nonmagnetic binary alloys. BH-looper results showed decrease in saturation magnetization alloys with increasing amount of the added metal. Impurity addition to nickel in UBM can create reliability issues especially with solder reaction. This may lead to a mechanically unstable film that ultimately results in an electrical open circuit from the die to the package. A solder reflow process is simulated to analyze reactions with SnAgCu lead-free solder via electron microscopy. SEM analysis showed increased contact angle and serious interfacial separation between Ni(Ti) and solder.
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file details thesis1.pdf 2017-08-14 Pubblico Scaricare